Materials Science in Microelectronics I
ebook ∣ The Relationships Between Thin Film Processing and Structure
By Eugene Machlin
![cover image of Materials Science in Microelectronics I](https://img1.od-cdn.com/ImageType-400/1706-1/751/185/A2/{751185A2-FD9C-4B5F-8702-6B7E317B02B1}Img400.jpg)
Sign up to save your library
With an OverDrive account, you can save your favorite libraries for at-a-glance information about availability. Find out more about OverDrive accounts.
Find this title in Libby, the library reading app by OverDrive.
![LibbyDevices.png](https://images.contentstack.io/v3/assets/blt3d151d94546d0edd/blt96637953bca8f11b/642dbad30afb1c108e793645/LibbyDevices.png)
Search for a digital library with this title
Title found at these libraries:
Loading... |
Thin films play a key role in the material science of microelectronics, and the subject matter of thin-films divides naturally into two headings: processing / structure relationship, and structure / properties relationship.
The first volume of Materials Science in Microelectronics focuses on the first relationship – that between processing and the structure of the thin-film. The state of the thin film's surface during the period that one monolayer exists - before being buried in the next layer – determines the ultimate structure of the thin film, and thus its properties. This volume takes into consideration the following potential influencing factors: crystal defects, void structure, grain structure, interface structure in epitaxial films, the structure of amorphous films, and reaction-induced structure.
An ideal text or reference work for students and researchers in material science, who need to learn the basics of thin films.
The first volume of Materials Science in Microelectronics focuses on the first relationship – that between processing and the structure of the thin-film. The state of the thin film's surface during the period that one monolayer exists - before being buried in the next layer – determines the ultimate structure of the thin film, and thus its properties. This volume takes into consideration the following potential influencing factors: crystal defects, void structure, grain structure, interface structure in epitaxial films, the structure of amorphous films, and reaction-induced structure.
An ideal text or reference work for students and researchers in material science, who need to learn the basics of thin films.