Ultrasonic nano/microfabrication, handling and driving is an emerging actuation technology, which utilizes ultrasonic vibration and the physical effects of ultrasonic vibration in fluids and solids to implement the fabrication, handling and driving of nano/micro scale objects. This book provides readers with the fundamentals, principles and characteristics of the ultrasonic devices for nano/micro fabrication, handling and driving, and design methods of the devices.

This book shares the advances, methods and applications of ultrasonic micro/nano fabrication techniques for entry-level and advanced readers working on nano/microfabrication, gas sensing, biological sensing, metal-air batteries, electronic component cooling, and other related areas.