Series: Progress in Numerical Simulation for Microelectronics

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cover image of Modeling of Chemical Vapor Deposition of Tungsten Films

Modeling of Chemical Vapor...

Progress in Numerical Simulation for Microelectronics (Series)

Chris R. Kleijn Author
Christoph Werner Author
(2013)

cover image of Three-Dimensional Simulation of Semiconductor Devices

Three-Dimensional Simulation...

Progress in Numerical Simulation for Microelectronics (Series)

Roland Kircher Author
Wolfgang Bergner Author
(2013)