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This special technical publication is Organized into six sections:(1)Crystal Growth and Epitaxial Deposition Techniques; (2) Fabrication Technology; (3) Microcontami¬nation; (4) Metallization and Interconnects; (5) Material Defects and Gettering; and (6) Control Charts, Standards and specifications. The papers describe technology and metrology of these areas. The brief synopses on two workshops; (1) Gettering Techniques and Characterization; (2) Gallium Arsenide are presented in the Appendix.
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