Secondary Ion Mass Spectrometry
ebook ∣ Applications for Depth Profiling and Surface Characterization
By Fred Stevie
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This book was written to explain a technique that requires an understanding of many details in order to properly obtain and interpret the data obtained. It also will serve as a reference for those who need to provide SIMS data. The book has over 200 figures and the references allow one to trace development of SIMS and understand the many details of the technique.
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