Practical lab manual on the stepwise description of the experimental procedures of micro electromechanical systems (MEMS) devices

Micro Electromechanical Systems (MEMS) is a highly practical lab manual on the relevant experimental procedures of MEMS devices, covering technical aspects including simulations and modeling, practical steps involved in fabrication, thorough characterizations of developed MEMS sensors, and leveraging these sensors in real-time targeted applications.

The book provides in-depth coverage of multi-physics modeling for various sensors, as well as fabrication methodologies for photolithography, soft lithography, 3D printing, and laser processing-based experimental details for the realization of MEMS devices. It also covers characterization techniques from morphological to compositional, and applications of MEMS devices in contemporary fields such as microfluidics, wearables, and energy harvesters. The text also includes a foundational introduction to the subject.

The book covers additional topics such as:

A practical guidebook on the subject, Micro Electromechanical Systems (MEMS) is a must-have resource for students, academicians, and lab technicians seeking to conduct experiments in real-time.