奈米IC晶片三種製程方法

ebook

By Kung Linliu

cover image of 奈米IC晶片三種製程方法

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時序進入2025年, IC製程已可試量產2nm(奈米)!
因此,本書將介紹奈米IC晶片電路三種製程方法:
(1)多重曝光方法
(2)半導體線寬製程控制
(3)硬罩幕方法

奈米IC晶片三種製程方法